Melia Tjio

发表

Customization and design of directed self-assembly using hybrid prepatterns

Markus Brink, Gurpreet Singh, Joy Cheng, 2015, Advanced Lithography.

Self-assembly patterning for sub-15nm half-pitch: a transition from lab to fab

William D. Hinsberg, Chris Bencher, Hoa D. Truong, 2011, Advanced Lithography.

Computational aspects of optical lithography extension by directed self-assembly

Neal Lafferty, Joy Cheng, Hsinyu Tsai, 2013, Advanced Lithography.

Computational lithography platform for 193i-guided directed self-assembly

Kafai Lai, Neal Lafferty, Joy Cheng, 2014, Advanced Lithography.

Directed self-assembly of topcoat-free, integration-friendly high-x block copolymers

Edward Ng, Jianhui Shan, Guanyang Lin, 2015, Advanced Lithography.

Towards electrical testable SOI devices using Directed Self-Assembly for fin formation

Akiteru Ko, Hong He, Nihar Mohanty, 2014, Advanced Lithography.

Directed self-assembly defectivity assessment. Part II

Ofir Montal, Kfir Dotan, Joy Cheng, 2012, Advanced Lithography.

Progress towards the integration of optical proximity correction and directed self-assembly of block copolymers with graphoepitaxy

Neal Lafferty, Joy Cheng, Charles T. Rettner, 2012, Advanced Lithography.

Directed self-assembly process implementation in a 300mm pilot line environment

Joy Cheng, Mark Somervell, Hsinyu Tsai, 2013, Advanced Lithography.

Synthesis and Characterization of Polycarbonate-containing All-organic High-χ Block Copolymers for Directed Self-assembly

Joy Cheng, Daniel P. Sanders, Teddie Magbitang, 2015 .

Directed Self-assembly of Topcoat-free, Integration-friendly High-χ Block Copolymers

Joy Cheng, Guanyang Lin, Daniel P. Sanders, 2014 .