Patrick J. Shea
发表
Alan S. Kolok,
Cheryl L. Beseler,
Xun-Hong Chen,
2009,
Environmental health insights.
Patrick J. Shea,
Sheri L. Smith,
Brian L. Strom,
2009
.
Electrical linewidth test structures patterned in [100] silicon-on-insulator for use as CD standards
Richard A. Allen,
John E. Bonevich,
Michael W. Cresswell,
2001
.
Richard A. Allen,
John E. Bonevich,
Michael W. Cresswell,
2000,
Advanced Lithography.