L. Rousseau

Advanced etching of silicon based on deep reactive ion etching for silicon high aspect ratio microstructures and three-dimensional micro- and nanostructures

F. Marty, L. Rousseau, B. Saadany, 2005, Microelectron. J..

Comparing silicon and diamond micro-cantilevers based sensors for detection of added mass and stiffness changes

G. Lissorgues, F. Ghassemi, M. Possas, 2015 .