G. Liu

The radial bulk annular resonator: towards a 50/spl Omega/ RF MEMS filter

Tsu-Jae King, B. Bircumshaw, R. Howe, 2003, TRANSDUCERS '03. 12th International Conference on Solid-State Sensors, Actuators and Microsystems. Digest of Technical Papers (Cat. No.03TH8664).

Hydrogen peroxide etching and stability of p-type poly-SiGe films

C. W. Low, R. Howe, A. Pisano, 2004, 17th IEEE International Conference on Micro Electro Mechanical Systems. Maastricht MEMS 2004 Technical Digest.