Kohei Toda

4H-SiC Full Wafer Mapping Image of CMP-Finished Sub-Surface Damage by Laser Light Scattering

T. Kaneko, Daichi Dojima, Daichi Dansako, 2023 .

Suppression of In-Grown SF Formation and BPD Propagation in 4H-Sic Epitaxial Layer by Sublimating Sub-Surface Damage before the Growth

T. Kaneko, K. Kojima, Daichi Dojima, 2023, Solid State Phenomena.

Effect of Sub-Surface Damage Layer Removal by Sublimation Etching of 4H-SiC Bulk Wafers on PL Imaging of Crystal Defect Visibility

T. Kaneko, Daichi Dojima, Daichi Dansako, 2023 .