Masato Nakasuji

The coherent EUV scatterometry microscope for actinic mask inspection and metrology

Takeo Watanabe, Yutaka Nagata, Tetsuo Harada, 2011, Photomask Japan.

Development of coherent EUV scatterometry microscope with high-order harmonic for EUV mask inspection

Katsumi Midorikawa, Hiroo Kinoshita, Tetsuo Harada, 2013, Optics & Photonics - Optical Engineering + Applications.

Development of standalone coherent EUV scatterometry microscope with high-harmonic-generation EUV source

Takeo Watanabe, Hiroo Kinoshita, Tetsuo Harada, 2012, Other Conferences.

Phase imaging of EUV masks using a lensless EUV microscope

Takeo Watanabe, Hiroo Kinoshita, Tetsuo Harada, 2013, Photomask and Next Generation Lithography Mask Technology.