Albert Karabekov

Image quality monitoring for enhanced precision and tool matching of CD measuring tools

Ayelet Pnueli, Albert Karabekov, Guy Eytan, 2004, SPIE Advanced Lithography.

Verification of height and sidewall angle SEM metrology accuracy using Monte Carlo simulation

Ofer Adan, Ovadya Menadeva, Ram Peltinov, 2005, SPIE/COS Photonics Asia.

Using Monte Carlo simulation for accurate critical dimension metrology of super small isolated poly-lines

Albert Karabekov, Guy Eytan, Z. Rosenberg, 2006 .