Christian A. Zorman

发表

Invited) High Temperature Wireless Smart Sensor Technology Based on Silicon Carbide Electronics

Gary W. Hunter, George E. Ponchak, Roger D. Meredith, 2014 .

High-temperature testing of nickel wire bonds for SiC devices

Shuvo Roy, Mehran Mehregany, Christian A. Zorman, 1999, Smart Materials, Nano-, and Micro- Smart Systems.

Non‐hermetic packaging of biomedical microsystems from a materials perspective: A review

Steve J. A. Majerus, Kath M. Bogie, Christian A. Zorman, 2020, MEDICAL DEVICES & SENSORS.

fab. and test, of SiC electrostatic cantilever actuato

Liudi Jiang, Musaab Hassan, Christian A. Zorman, 2003 .

Silicon carbide micro- and nanoelectromechanical systems

Mehran Mehregany, Christian A. Zorman, M. Mehregany, 2004, SPIE MOEMS-MEMS.

Development of amorphous SiC for MEMS-based microbridges

Christian A. Zorman, Maximilian C. Scardelletti, James B. Summers, 2007, SPIE MOEMS-MEMS.

Material Aspects of Micro- and Nanoelectromechanical Systems

Mehran Mehregany, Christian A. Zorman, M. Mehregany, 2010 .

Fabrication and characterization of polycrystalline SiC resonators

Shuvo Roy, Mehran Mehregany, Christian A. Zorman, 2002 .

Examination of Bulge Test for Determining Residual Stress, Young's Modulus, and Poisson's Ratio of 3C-SiC Thin Films

Shuvo Roy, Mehran Mehregany, Jay Mitchell, 2003 .

New developments in MEMS using SiC and TiNi shape memory alloy materials

Mehran Mehregany, Harold Kahn, Christian A. Zorman, 1997 .

Temperature dependence of SiC thin film metal-insulator-metal (MIM) capacitors on alumina over a temperature range from 25 to 500ºC

George E. Ponchak, Maximilian C. Scardelletti, Jennifer L. Jordan, 2011, 2011 IEEE 61st Electronic Components and Technology Conference (ECTC).

Finite-Element Modeling of Residual Stress in SiC Diaphragms

Mehran Mehregany, Christian A. Zorman, Russell G. DeAnna, 1998 .

Mechanically adaptive nanocomposites for neural interfacing

Stuart J. Rowan, Christoph Weder, Dustin J. Tyler, 2012 .

Monocrystalline NbN nanofilms on a 3C-SiC/Si substrate

T. M. Klapwijk, Frans D. Tichelaar, Mehran Mehregany, 2007 .

Fabrication and Testing of Single Crystalline 3C-SiC Piezoresistive Pressure Sensors

Chien-Hung Wu, Mehran Mehregany, Christian A. Zorman, 2001 .

Characterization of Polycrystalline SiC Grown on SiO2 and Si3N4 by APCVD for MEMS Applications

Mehran Mehregany, Christian A. Zorman, M. Mehregany, 2000 .

Additive Processes for Semiconductors and Dielectric Materials

Robert C. Roberts, Christian A. Zorman, C. Zorman, 2011 .

The confluence zone of the intense katabatic winds at Terra Nova Bay, Antarctica, as derived from airborne sastrugi surveys and mesoscale numerical modeling

Christian A. Zorman, David H. Bromwich, D. Bromwich, 1990 .

Development of a Multilayer SiC Surface Micromachining Process with Capabilities and Design Rules Comparable to Conventional Polysilicon Surface Micromachining

Mehran Mehregany, Srihari Rajgopal, Christian A. Zorman, 2002 .

Electric Field Patterning of Organic Nanoarchitectures with Self-Assembled Molecular Fibers

Kenneth D. Singer, Volodimyr V. Duzhko, Christian A. Zorman, 2008 .

Silicon carbide for MEMS and NEMS - an overview

Mehran Mehregany, Christian A. Zorman, 2002, Proceedings of IEEE Sensors.

SiC MEMS: Opportunities and challenges for applications in harsh environments

Mehran Mehregany, Christian A. Zorman, M. Mehregany, 1999 .

SiC cantilever resonators with electrothermal actuation

Liudi Jiang, Rebecca Cheung, Mehran Mehregany, 2006 .

Development of polynorbornene as a structural material for microfluidics and flexible BioMEMS

Christian A. Zorman, Allison Hess-Dunning, C. Zorman, 2014 .

Fabrication of SiC microelectromechanical systems using one-step dry etching

Liudi Jiang, Rebecca Cheung, Mehran Mehregany, 2003 .

Electrothermal tuning of Al–SiC nanomechanical resonators

James Hone, Mehran Mehregany, Seong Chan Jun, 2006 .

Mechanical properties of a 3C-SiC film between room temperature and 600 °C

Liudi Jiang, Rebecca Cheung, Mehran Mehregany, 2007 .

Deposition and Characterization of In-Situ Boron Doped Polycrystalline Silicon Films for Microelectromechanical Systems Applications

Mehran Mehregany, Christian A. Zorman, J. M. Melzak, 1999 .

Materials for Microelectromechanical Systems

Mehran Mehregany, Christian A. Zorman, M. Mehregany, 2001 .

Femtosecond pulsed laser micromachining of single crystalline 3C–SiC structures based on a laser-induced defect-activation process

Christian A. Zorman, Pal Molian, C. Zorman, 2003 .

Silicon carbide MEMS-resonator-based oscillator

Darrin J. Young, Christian A. Zorman, C. Zorman, 2009 .

Development of a stimuli-responsive polymer nanocomposite toward biologically optimized, MEMS-based neural probes

Christoph Weder, Dustin J. Tyler, Christian A. Zorman, 2011 .

Design, Operation, and Modeling of a Vertical APCVD Reactor for Silicon Carbide Film Growth

Mehran Mehregany, Aaron J. Fleischman, Christian A. Zorman, 1998 .

Monocrystalline silicon carbide nanoelectromechanical systems

Mehran Mehregany, Michael L. Roukes, Kamil L. Ekinci, 2001 .

Etching of 3C-SiC using CHF3/O2 and CHF3/O2/He plasmas at 1.75 Torr

Mehran Mehregany, Aaron J. Fleischman, Christian A. Zorman, 1998 .

Amorphous SiC as a structural layer in microbridge-based RF MEMS switches for use in software-defined radio

Maximilian C. Scardelletti, Nicholas C. Varaljay, Christian A. Zorman, 2008 .

Fabrication and Characterization of Flexible, Microfabricated Neural Electrode Arrays Made from Liquid Crystal Polymer and Polynorbornene

Dominique M. Durand, Christian A. Zorman, Varun Vardhan Keesara, 2006 .

A Programmable Sustaining Amplifier for Flexible Multimode MEMS-Referenced Oscillators

Soumyajit Mandal, Philip X.-L. Feng, Christian A. Zorman, 2019, IEEE Transactions on Circuits and Systems I: Regular Papers.

Nitrogen-Doping of Polycrystalline 3C-SiC Films Deposited by Low Pressure Chemical Vapor Deposition

Mehran Mehregany, Christian A. Zorman, Jacob Trevino, 2006 .

A New Class of Low‐Temperature Plasma‐Activated, Inorganic Salt‐Based Particle‐Free Inks for Inkjet Printing Metals

Christian A. Zorman, Yongkun Sui, R. Mohan Sankaran, 2019, Advanced Materials Technologies.

Optical properties of sub-wavelength hole arrays in SiC membranes

Yaroslav A. Urzhumov, Gennady Shvets, Burton Neuner, 2007 .

Microscale Characterization of a Mechanically Adaptive Polymer Nanocomposite With Cotton-Derived Cellulose Nanocrystals for Implantable BioMEMS

Stuart J. Rowan, Christoph Weder, Dustin J. Tyler, 2014, Journal of Microelectromechanical Systems.

Silicon carbide MEMS for harsh environments

Mehran Mehregany, Christian A. Zorman, N. Rajan, 1998, Proc. IEEE.

Roughness Reduction of 3C‐SiC Surfaces Using SiC‐Based Mechanical Polishing Slurries

Mehran Mehregany, Christian A. Zorman, M. Mehregany, 1999 .

PVD silicon carbide as a thin film packaging technology for antennas on LCP substrates for harsh environments

George E. Ponchak, Maximilian C. Scardelletti, Jennifer L. Jordan, 2010, 2010 IEEE Radio and Wireless Symposium (RWS).

Focused Ion-Beam (FIB) Nanomachining of Silicon Carbide (SiC) Stencil Masks for Nanoscale Patterning

Philip X.-L. Feng, Christian A. Zorman, Amir Avishai, 2012 .

Effect of MEMS-compatible thin film hard coatings on the erosion resistance of silicon micromachined atomizers

Mehran Mehregany, Christian A. Zorman, N. Rajan, 1998 .