Kiho Yang

Characteristics analysis of polarization module on optical proximity effect

Alek C. Chen, Donggyu Yim, Chanha Park, 2007, SPIE Advanced Lithography.

The analysis of optical lithography at 2-dimensional dense structure

Donggyu Yim, Jin-Woong Kim, Jin-Soo Kim, 2008, SPIE Advanced Lithography.

Resolution enhancement techniques for contact hole printing of sub-50nm memory device

Donggyu Yim, Hye-Jin Shin, Jinyoung Choi, 2008, Lithography Asia.

Study of OPC accuracy by illumination source types

Donggyu Yim, Sungki Park, Daejin Park, 2009, Lithography Asia.

High NA polarized light lithography for 0.29k1 process

Alek C. Chen, Donggyu Yim, Chanha Park, 2006, SPIE Advanced Lithography.