T. Itoh

High-Speed Copper Filling within High Aspect Ratio Through Holes in Polymer Substrates

Y. Zhang, A. Toda, Q. Zhu, 2013, International Journal of Electrochemical Science.

The influence of DC bias on the displacement and sensor output of self-sensitive piezoelectric microcantilevers

Ryutaro Maeda, Takeshi Kobayashi, R. Maeda, 2008 .

A fatigue test method for Pb(Zr,Ti)O3 thin films by using MEMS-based self-sensitive piezoelectric microcantilevers

Ryutaro Maeda, Toshihiro Itoh, Takeshi Kobayashi, 2008 .

MEMS-based microsensors using piezoelectric thin films as sensors and actuators

H. Funakubo, R. Maeda, Takeshi Kobayashi, 2014 .

Low speed piezoelectric optical microscanner actuated by piezoelectric microcantilevers using LaNiO3 buffered Pb(Zr,Ti)O3 thin film

Toshihiro Itoh, Takeshi Kobayashi, R. Maeda, 2009 .

Novel MEMS-based fabrication technology of micro solenoid-type inductor

R. Maeda, H. Takagi, S. Uchiyama, 2013 .

An AlN cantilever for a wake-up switch triggered by air pressure change

K. Matsumoto, I. Shimoyama, T. Itoh, 2013 .

Film stress dependence on deposition temperature in scandium aluminium nitride thin film

T. Kobayashi, N. Makimoto, T. Tabaru, 2018, Journal of Physics: Conference Series.