K. Obara

A robust SEM auto-focus algorithm using multiple band-pass filters

Koji Nakamae, Minoru Harada, Kenji Obara, 2016 .

Model Based Defect Detection in Multi-Dimensional Vector Spaces

Hajime Igarashi, Minoru Harada, Toshifumi Honda, 2011 .

Efficient killer-defect control using reliable high-throughput SEM-ADC

Kenji Watanabe, Yuji Takagi, Toshiei Kurosaki, 2001, 2001 IEEE/SEMI Advanced Semiconductor Manufacturing Conference (IEEE Cat. No.01CH37160).

High-Sensitivity Detection of Slight Deformation Using Multiple SEM Images

Mitsuji Ikeda, Minoru Harada, Toshifumi Honda, 2009 .