Souichi Katagiri

Aspheric Mirror Fabrication Technology using Dynamically Controlled Multi-Tool Polishing Force.

Masaaki Ito, Katsuhiko Yamaguchi, Eiichi Seya, 1998 .

Optical system for high-throughput EUV lithography

Tsuneo Terasawa, Masaaki Ito, Hiromasa Yamanashi, 1996, Advanced Lithography.

Alignment technique using wafer rear surface

Tsuneo Terasawa, Souichi Katagiri, Shigeo Moriyama, 1992, Advanced Lithography.

In-position optical surface measurement for x-ray projection lithography optics: theory and simulation

Eiji Takeda, Masaaki Ito, Minoru Hidaka, 1993, Optics & Photonics.

The Effect of Condenser Tilt on Optical Projection Lithography

Tsuneo Terasawa, Souichi Katagiri, Katsunobu Hama, 1991 .

Belt Drive of Linear Air Slide (1st Report)

Akira Shimokohbe, Kiyohiko Umezawa, Hisayuki Aoyama, 1987 .