Yukun Ma

Temperature compensation of MEMS resonant accelerometers with an on-chip platinum film thermometer

Yunfeng Liu, Fengtian Han, Wenyi Xu, 2023, Journal of Micromechanics and Microengineering.

Design and Test of MEMS Resonant Accelerometer with a Novel Die-Attach Structure

Yukun Ma, Shaohang Wang, Wenyi Xu, 2023, 2023 IEEE SENSORS.