David Ziger

Swing curve prediction from reflectance spectra: a new method to predict optimal resist thicknesses and compare processes

David Ziger, 2004, SPIE Advanced Lithography.

LINESIZE EFFECTS ON ULTRAVIOLET REFLECTANCE SPECTRA

David Ziger, Joseph G. Garofalo, Thomas Evans Adams, 1997 .

Understanding optical end of line metrology

David Ziger, Pierre Leroux, 2000 .