B. Bains

Intel 4 CMOS Technology Featuring Advanced FinFET Transistors optimized for High Density and High-Performance Computing

Dilip Krishnan, N. Lindert, J. Sandford, 2022, 2022 IEEE Symposium on VLSI Technology and Circuits (VLSI Technology and Circuits).

Direct print EUV patterning of tight pitch metal layers for Intel 18A process technology node

K. Fischer, R. Bigwood, N. Moumen, 2022, Photomask Technology.