Makoto Nakano

Suppression of backside damage in nanosecond internal-focusing pulse laser dicing with wavefront modulation

Takashi Inoue, Yu Takiguchi, Haruyoshi Toyoda, 2017 .

Improvement of laser dicing system performance I: high-speed, high-quality processing of thick silicon wafers using spatial light modulator

Takashi Inoue, Yu Takiguchi, Naoya Matsumoto, 2013, Photonics West - Lasers and Applications in Science and Engineering.

Improvement of laser dicing performance II: dicing rate enhancement by multi beams and simultaneous aberration correction with phase-only spatial light modulator

Takashi Inoue, Yu Takiguchi, Naoya Matsumoto, 2013, Photonics West - Lasers and Applications in Science and Engineering.

Development of Low Power Physics Tests

Makoto Nakano, Jun Kimura, Takaaki Kobayashi, 2004 .

Development of the Wide Field Grism Spectrograph 2

Klaus W. Hodapp, Noboru Ebizuka, Tetsuya Nagata, 2004, SPIE Astronomical Telescopes + Instrumentation.

Analysis of Processing Mechanism in Stealth Dicing of Ultra Thin Silicon Wafer

Etsuji Ohmura, Kenshi Fukumitsu, Hideki Morita, 2007 .

Photoresponsive Behavior of Azobenzene Liquid-Crystalline Gels

Yanlei Yu, Tomiki Ikeda, Takeshi Shiono, 2003 .

Anisotropic Bending and Unbending Behavior of Azobenzene Liquid‐Crystalline Gels by Light Exposure

Tomiki Ikeda, Osamu Tsutsumi, Akihiko Kanazawa, 2003 .