Christian Helke

Challenges of nanostructure-integration in Fabry-Pérot interferometers as alternative to Bragg reflectors: an example for Match 1:1-, eBeam-, and nanoimprint lithography

Karla Hiller, Thomas Otto, Steffen Kurth, 2017, European Mask and Lithography Conference.

Large-scale fabrication of LP-CVD Si3N4 photonic crystal structures as freestanding reflectors with 1 mm aperture for Fabry-Pérot interferometers

Karla Hiller, Steffen Kurth, Thomas Otto, 2017, NanoScience + Engineering.

VIS Fabry-Pérot Interferometer with structured (TiO2/PE-SiO2)3 Bragg-reflectors on 5mm large LP-Si3N4 membranes

Karla Hiller, Thomas Werner, Thomas Otto, 2019, OPTO.

VIS Fabry-Pérot-Interferometer with (HL)4 PE-Si3N4/PE-SiO2 reflectors on freestanding LP-Si3N4 membranes for surface enhanced Raman spectroscopy

Karla Hiller, Thomas Gessner, Steffen Kurth, 2016, SPIE OPTO.