K. An

Formulation and Evaluation of Diluted Sulfuric-Peroxide-HF (DSP+) Mixtures for Cleaning High-Aspect Ratio Contacts in 3D NAND

Nagendra Prasad Yerriboina, J. Park, K. An, 2021 .

Hybrid DHF and N2 jet spray cleaning for silicon nitride and metal layer DRAM patterns

Dong-Kyu Lee, Hunhee Lee, Jin-Goo Park, 2020 .