Koichiro Tanaka

A Study on PSK-VP FER Performance for Application to ITS Road to Vehicle Communication

Hidetoshi Yamasaki, Kenji Miyanaga, Hideki Nakahara, 2002 .

Coater/developer based techniques to improve high-resolution EUV patterning defectivity

Yongan Xu, Akiteru Ko, Nelson Felix, 2017, Photomask Technology.

Defect detection strategies and process partitioning for SE EUV patterning

Jeffrey Shearer, John Arnold, Nelson Felix, 2018, Advanced Lithography.