Yukio Matsuyama

Precise Visual Inspection of LSI Wafer Patterns by Local Perturbation Pattern Matching Algorithm

Yasuo Nakagawa, Hitoshi Kubota, Yukio Matsuyama, 1990, Systems and Computers in Japan.

Precise Visual Inspection Algorithm for LSI Wafer Patterns Using Grayscale Image Comparison

Yasuo Nakagawa, Hitoshi Kubota, Yukio Matsuyama, 1988, MVA.