David S. Soane

发表

Plastics for electronics: Materials, properties and design applications. By William M. Alvino, McGraw‐Hill, New York, 1995, 363 pp., $50.00

David S. Soane, 1996 .

Silicon Oxidation During Bilayer Resist Etching

Robert D. Allen, Dennis W. Hess, David S. Soane, 1989, Advanced Lithography.

Effects Of Ion Bombardment In Oxygen Plasma Etching

David S. Soane, M. A. Hartney, W. M. Greene, 1988, Advanced Lithography.

Microstructural diagnosis of block copolymer nonlinear mechanical properties I. Uniaxial stress/strain

David S. Soane, D. Soane, Joram Diamant, 1988 .

A diffusion/chemical reaction model for HE etching of LPCVD phosphosilicate glass sacrificial layers

David J. Monk, Roger T. Howe, David S. Soane, 1992, Technical Digest IEEE Solid-State Sensor and Actuator Workshop.

In Situ Ellipsometry to Monitor Swelling and Dissolution of Thin Polymer Films

Alexis T. Bell, David S. Soane, Dennis W. Hess, 1989 .

Oxygen plasma etching for resist stripping and multilayer lithography

David S. Soane, Dennis W. Hess, M. A. Hartney, 1989 .

Study of dynamics of diffusion and cluster formation of copper deposition on polyimide by optical second‐harmonic generation

Yaochun Shen, David S. Soane, Yaochun Shen, 1992 .

LPCVD Silicon Dioxide Sacrificial Layer Etching for Surface Micromachining

David J. Monk, Roger T. Howe, David S. Soane, 1992 .

Hydrofluoric Acid Etching of Silicon Dioxide Sacrificial Layers I . Experimental Observations

David J. Monk, Roger T. Howe, David S. Soane, 1994 .

Determination of the Etching Kinetics for the Hydrofluoric Acid/Silicon Dioxide System

David J. Monk, Roger T. Howe, David S. Soane, 1993 .

Hydrofluoric Acid Etching of Silicon Dioxide Sacrificial Layers II . Modeling

David J. Monk, Roger T. Howe, David S. Soane, 1994 .

Dissolution of Thin Poly(methyl methacrylate) Films in Ketones, Binary Ketone/Alcohol Mixtures, and Hydroxy Ketones

Alexis T. Bell, David S. Soane, Dennis W. Hess, 1989 .

Polymers in Microelectronics: Fundamentals and Applications

David S. Soane, D. Soane, Zoya Martynenko, 1989 .

Sacrificial layer SiO/sub 2/ wet etching for micromachining applications

David J. Monk, Roger T. Howe, David S. Soane, 1991, TRANSDUCERS '91: 1991 International Conference on Solid-State Sensors and Actuators. Digest of Technical Papers.