P. H. Langer

Run-by-run process control: performance benchmarks

Armann Ingolfsson, Emanuel M. Sachs, A. Hu, 1992, [1992 Proceedings] IEEE/SEMI International Semiconductor Manufacturing Science Symposium.

Modeling and control of an epitaxial silicon deposition process with step disturbances

Armann Ingolfsson, Emanuel M. Sachs, A. Hu, 1991, [1991 Proceedings] IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop.