Kenichi Hibino

发表

Measurement of absolute optical thickness by wavelength tuning interferometer

Kenichi Hibino, Yangjin Kim, Youichi Bitou, 2011, International Commission for Optics.

Quantitative wavefront measurement using a ronchi test with a phase-shifted sinusoidal grating

Kenichi Hibino, 1993, International Commission for Optics.

Dual-phase-shift schemes for internal-reflection noise reduction in a Fizeau interferometer

Kenichi Hibino, Toshiki Kumagai, Yasunari Nagaike, 2016, Optical Engineering + Applications.

Measurement of absolute optical thickness distribution of a mask-glass by wavelength tuning interferometry

Kenichi Hibino, Youichi Bitou, Mamoru Mitsuishi, 2008, Optical Engineering + Applications.

Refractive index inhomogeneity measurement of a parallel plate in a Fizeau interferometer by a new wavelength scanning algorithm

Kenichi Hibino, Bozenko F. Oreb, Philip S. Fairman, 2003, International Commission for Optics.

Phase determination algorithms compensating for spatially nonuniform phase modulation in phase-shifting interferometry

Kenichi Hibino, Makoto Yamauchi, 1998, Optics & Photonics.

Interferometric measurement of a multiparallel-surface transparent object by a new class of wavelength tuning algorithms

Kenichi Hibino, Ryohei Hanayama, Bozenko F. Oreb, 2004, SPIE Optics + Photonics.

Measurement of optical thickness variation of a multiple-surface object by a wavelength tuning interferometer

Kenichi Hibino, Ryohei Hanayama, Jan Burke, 2005, International Commission for Optics.

Dual-phase-shift spherical Fizeau interferometer for reduction of noise due to internally scattered light

Kenichi Hibino, Toshiki Kumagai, Yasunari Nagaike, 2017 .

Synthetic aperture phase-shifting interferometry for high numerical-aperture spherical surface measurement

Kenichi Hibino, Toshiki Kumagai, Yasunari Nagaike, 2018, Optical Engineering + Applications.

Measurement of surface figure and optical thickness variation of a thin parallel plate in wavelength-scanned interferometry with minimized laser tuning range

Kenichi Hibino, Bozenko F. Oreb, Jan Burke, 2003, SPIE Optics + Photonics.

Improved algorithms for wavelength scanning interferometry: application to the simultaneous measurement of surface topography and optical thickness variation in a transparent parallel plate

Kenichi Hibino, Bozenko F. Oreb, Philip S. Fairman, 2002, SPIE Optics + Photonics.

Absolute interferometry for surface shapes with large steps by wavelength tuning with a mechanical phase shift

Toshiyuki Takatsuji, Kenichi Hibino, Youichi Bitou, 2006, SPIE Optics + Photonics.

Design of new window function of phase extraction algorithm in wavelength tuning Fizeau interferometer

Kenichi Hibino, Yangjin Kim, Mamoru Mitsuishi, 2014, Optics & Photonics - Optical Engineering + Applications.

Excess fraction measurement of a transparent glass thickness in wavelength tuning interferometry

Kenichi Hibino, Yangjin Kim, Mamoru Mitsuishi, 2013, Optical Metrology.

Three surface method of stylus error compensation for aspherical lens measurement in a 3D contact profilometry

Kenichi Hibino, Toshiki Kumagai, Yasunari Nagaike, 2018, Optical Engineering + Applications.

Susceptibility of error-compensating algorithms to random noise and nonlinear phase modulations in phase-shifting interferometry

Kenichi Hibino, 1997, Optics & Photonics.

Design of the phase-shifting algorithm for flatness measurement of a mask blank glass

Kenichi Hibino, Yangjin Kim, Mamoru Mitsuishi, 2014, Advanced Lithography.

Interferometric precision measurement of highly reflective thin film using wavelength tuning Fizeau interferometry

Mamoru Mitsuishi, Kenichi Hibino, Yangjin Kim, 2019, Optics + Optoelectronics.

Measurement of the surface shape and optical thickness variation of a polishing crystal wafer by wavelength tuning interferometer

Kenichi Hibino, Yangjin Kim, Mamoru Mitsuishi, 2014, Photonics Europe.

Synthetic aperture phase-shifting interferometry for high-numerical-aperture spherical surface measurement

Kenichi Hibino, Toshiki Kumagai, Yasunari Nagaike, 2021 .

Design of phase shifting algorithms: fringe contrast maximum.

Mamoru Mitsuishi, Naohiko Sugita, Kenichi Hibino, 2014, Optics express.

Measurement of optical thickness variation of BK7 plate by wavelength tuning interferometry.

Mamoru Mitsuishi, Naohiko Sugita, Kenichi Hibino, 2015, Optics express.

Error-Compensating Phase Measuring Algorithms in a Fizeau Inter ferometer

Kenichi Hibino, K. Hibino, 1999 .

Phase Measurement Algorithm in Wavelength Scanned Fizeau Interferometer

Mamoru Mitsuishi, Kenichi Hibino, Ryohei Hanayama, 2004 .

Surface profile measurement of a highly reflective silicon wafer by phase-shifting interferometry

Mamoru Mitsuishi, Naohiko Sugita, Kenichi Hibino, 2015 .

Suppression of Multiple-Beam Interference Noise in Testing an Optical-Parallel Plate by Wavelength-Scanning Interferometry

Toshiyuki Takatsuji, Kenichi Hibino, K. Hibino, 2002 .

Simultaneous measurement of surface shape and variation in optical thickness of a transparent parallel plate in wavelength-scanning Fizeau interferometer.

Jan Burke, Kenichi Hibino, K. Hibino, 2004, Applied optics.

Measurement of air turbulence for on-machine interferometry.

Kenichi Hibino, Makoto Yamauchi, K. Hibino, 2003, Applied optics.

Discontinuous surface measurement by wavelength-tuning interferometry with the excess fraction method correcting scanning nonlinearity.

Mamoru Mitsuishi, Toshiyuki Takatsuji, Kenichi Hibino, 2011, Applied optics.

Phase-Measuring Algorithms to Suppress Spatially Nonuniform Phase Modulation in a Two-Beam Interferometer

Kenichi Hibino, Makoto Yamauchi, K. Hibino, 2000 .

Third-order nonlinear optical properties of a π-conjugated biradical molecule investigated by third-harmonic generation spectroscopy

Kenichi Hibino, Arao Nakamura, Jiro Abe, 2010 .

Simultaneous measurement of surface shape and absolute optical thickness of a glass plate by wavelength tuning phase-shifting interferometry

Mamoru Mitsuishi, Naohiko Sugita, Kenichi Hibino, 2012 .

Simultaneous measurement of surface shape and optical thickness using wavelength tuning and a polynomial window function.

Mamoru Mitsuishi, Naohiko Sugita, Kenichi Hibino, 2015, Optics express.

Interferometric profile measurement of optical-thickness by wavelength tuning with suppression of spatially uniform error.

Mamoru Mitsuishi, Kenichi Hibino, Yangjin Kim, 2018, Optics express.

Multiple-surface interferometry of highly reflective wafer by wavelength tuning.

Mamoru Mitsuishi, Naohiko Sugita, Kenichi Hibino, 2014, Optics express.

Absolute optical thickness measurement of transparent plate using excess fraction method and wavelength-tuning Fizeau interferometer.

Mamoru Mitsuishi, Naohiko Sugita, Kenichi Hibino, 2015, Optics express.

Optical thickness measurement of mask blank glass plate by the excess fraction method using a wavelength-tuning interferometer

Mamoru Mitsuishi, Naohiko Sugita, Kenichi Hibino, 2013 .

Wavelength-scanning interferometry of a transparent parallel plate with refractive-index dispersion.

Kenichi Hibino, K. Hibino, B. Oreb, 2003, Applied optics.

Phase shifting algorithms for non-sinusoidal waveforms with phase shift errors

Kenichi Hibino, K. Hibino, B. Oreb, 1994 .