T. Cecil

Optimization from design rules, source and mask, to full chip with a single computational lithography framework: level-set-methods-based inverse lithography technology (ILT)

Vikram Tolani, Guangming Xiao, Bob Gleason, 2010, Advanced Lithography.

Advances in Inverse Lithography

S. Osher, Danping Peng, E. Yablonovitch, 2022, ACS Photonics.

Machine learning ILT for memory customers

Amyn Poonawala, Tom Cecil, Kyle Braam, 2021, Advanced Lithography.