Hirofumi Tsuchiyama

Comprehensive plug and play FD system realized Predictive Maintenance

Ryosei Kawai, Tetsuya Tabaru, Katsuhisa Sakai, 2008, 2008 International Symposium on Semiconductor Manufacturing (ISSM).

Using actual equipment data for process prediction in high-mix production

Hiroyuki Nakata, Katsuhisa Sakai, Hirofumi Tsuchiyama, 2010, 2010 International Symposium on Semiconductor Manufacturing (ISSM).

Effective Indicators to Monitor Polishing Uniformity and Pad Life Time in CMP Process

Katsuhide Watanabe, Hirofumi Tsuchiyama, Takashi Kurosawa, 2013 .