Hao-Chih Liu

RP of Si3N4 burner arrays via assembly mould SDM

Fritz B. Prinz, Sangkyun Kang, Christopher F. Edwards, 2004 .

Carbon nanotube AFM probes for microlithography process control

Gregory A. Dahlen, Marc Osborn, Jason R. Osborne, 2006, SPIE Advanced Lithography.

Critical dimension AFM tip characterization and image reconstruction applied to the 45-nm node

Rohit Jain, Gregory A. Dahlen, Marc Osborn, 2006, SPIE Advanced Lithography.