E. Pabo

Key enabling processes for more-than-moore technologies

V. Dragoi, T. Glinsner, P. Lindner, 2012, 2012 IEEE International SOI Conference (SOI).

Wafer bonding technology for new generation vacuum MEMS: challenges and promises

V. Dragoi, E. Pabo, 2015, Microtechnologies for the New Millennium.