A. Minotti

Fabrication Techniques in Micromachined Capacitive Ultrasonic Transducers and their Applications

Vittorio Foglietti, Elena Cianci, Alessandro Caronti, 2006 .

One-dimensional capacitative micromachined ultrasonic transducer arrays for echographic probes

M. Pappalardo, G. Caliano, V. Foglietti, 2004 .

Dual frequency PECVD silicon nitride for fabrication of CMUTs' membranes

Vittorio Foglietti, Elena Cianci, A. Schina, 2006 .