Yautzong Hsu

Controlling template erosion with advanced cleaning methods

Peter Dress, Hongying Wang, Zhaoning Yu, 2012, Advanced Lithography.

Fabrication of servo-integrated template for 1.5  Teradot/inch2 bit patterned media with block copolymer directed assembly

Shuaigang Xiao, Kim Y. Lee, Justin J. Hwu, 2014 .

Epoxidized novolac resist (EPR) for high-resolution negative- and positive-tone electron beam lithography

Evangelos Gogolides, Ioannis Raptis, George P. Patsis, 2000, Advanced Lithography.

Cleaning induced imprint template erosion

Peter Dress, Hongying Wang, Zhaoning Yu, 2012 .

Imprint directed self-assembly of cylinder-forming Si-containing block copolymer for 6nm half-pitch line patterning

Shuaigang Xiao, Kim Y. Lee, XiaoMin Yang, 2015, Advanced Lithography.

Hydrogen silsesquioxane bilayer resist process for low-voltage electron beam lithography

C. Grant Willson, Alan Brodie, Yautzong Hsu, 2002, SPIE Advanced Lithography.

Spectroscopic ellipsometry optical critical dimension measurements of templates and imprinted resist for patterned magnetic media applications

Yongdong Liu, Zhaoning Yu, Nobuo Kurataka, 2010 .

Servo-integrated patterned media by hybrid directed self-assembly.

Shuaigang Xiao, Kim Y. Lee, Koichi Wago, 2014, ACS nano.