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Characterization and Control of Residual Stress and Curvature in Anodically Bonded Devices and Substrates with Etched Features

Gavin P. Horn, Harley T Johnson, H. Johnson, 2012 .

Characterization and Control of Residual Stress and Curvature in Anodically Bonded Devices and Substrates with Etched Features

H. Johnson, G. Horn, M. Yadav, 2011, Experimental Mechanics.