Toshiaki Shinozaki

Highly Sensitized Electron-Beam Resist By Means Of A Quenching Process

Fumiaki Shigemitsu, Takashi Tsuchiya, Yoshihide Kato, 1987, Advanced Lithography.

Method and apparatus for guetepruefung of masks.

Toshiaki Shinozaki, Sadao Sasaki, 1986 .

Novel piezoelectric-driven XYθ wafer table for an electron beam image projector

T. Tojo, Ichiro Mori, Toshiaki Shinozaki, 1985 .

Piezoelectrically driven XYθ table for submicron lithography systems

Toru Tojo, Ichiro Mori, Toshiaki Shinozaki, 1989 .