Rodgers

发表

Designing microelectromechanical systems-on-a-chip in a 5-level surface micromachine technology

Rodgers, J. J. Sniegowski, 1998 .

Intricate Mechanisms-on-a Chip Enabled by 5-Level Surface Micromachining

Paul J. McWhorter, Rodgers, James J. Allen, 1999 .

Manufacturing microsystems-on-a-chip with 5-level surface micromachining technology

Rodgers, J. Sniegowski, 1998 .

Sandia Agile MEMS Prototyping, Layout Tools, Education and Services Program

Rodgers, James J. Allen, Jeffry J. Sniegowski, 1998 .

A manufacturing method for multi-layer polysilicon surface-micromachining technology

Rodgers, J. J. Sniegowski, 1998 .

Infrastructure, Technology and Applications of Micro-Electro-Mechanical Systems (MEMS)

Rodgers, James J. Allen, S. Montague, 1999 .

Monolithic geared-mechanisms driven by a polysilicon surface-micromachined on-chip electrostatic microengine

Paul J. McWhorter, Rodgers, Rodgers, 1996 .