Gary S. May

Neural network-based real-time malfunction diagnosis of reactive ion etching using in situ metrology data

G.S. May, Sang Jeen Hong, Sang Jeen Hong, 2004, IEEE Transactions on Semiconductor Manufacturing.

Thickness and Uniformity Modeling of the Deposition of Shape Memory Polymers for Information Storage Applications

G. May, K. Gall, E. Wornyo, 2008, 2008 IEEE/SEMI Advanced Semiconductor Manufacturing Conference.