Sai Gao

A dual-styli micro-machined system for precise determination of the thickness of free-standing thin films

Uwe Brand, Ludger Koenders, Zhi Li, 2014, Photonics Europe.

A multi-functional MEMS-SPM for quantitative characterization of nano-objects

Uwe Brand, Karla Hiller, Zhi Li, 2017, Microtechnologies.

A MEMS nanoindenter with an integrated AFM cantilever gripper for nanomechanical characterization of compliant materials

H. Wolff, K. Hiller, Z. Li, 2020, Nanotechnology.