Rolf Seltmann

In-process image detection technique for determination of overlay and image quality for ASM-L wafer stepper

Rainer Pforr, Stefan Wittekoek, Roland Van Den Bosch, 1992, Advanced Lithography.

CD control with defect inspection: you can teach an old dog a new trick

Rolf Seltmann, Stefan Meusemann, Jan Heumann, 2012, Photomask Technology.