David J. Stein

发表

Prediction of tungsten CMP pad life using blanket removal rate data and endpoint data obtained from process temperature and carrier motor current measurements

David J. Stein, Dale L. Hetherington, 1999, Other Conferences.

In-line monitoring of chemical-mechanical polishing processes

David J. Stein, Dale L. Hetherington, 1999, Advanced Lithography.

High voltage with Si series photovoltaics

Alex Hsia, David J. Stein, R. D. Nasby, 2006, SPIE Optics + Photonics.

Chemical-mechanical planarization : symposium held April 22-24, 2003, San Francisco, California, U.S.A.

Duane S. Boning, Katia Devriendt, David J. Stein, 2003 .

Recent advances in endpoint and in-line monitoring techniques for chemical-mechanical polishing processes

David J. Stein, Dale L. Hetherington, 2001, Microelectronic and MEMS Technologies.

Analysis of in-situ vibration monitoring for end-point detection of CMP planarization processes

James P. Lauffer, David J. Stein, Dale L. Hetherington, 1999, Other Conferences.

Micromachined conformal electrode array for retinal prosthesis application

Murat Okandan, Conrad D. James, Michael S. Baker, 2003, SPIE MOEMS-MEMS.

High voltage series connected Si photovoltaic cells

Alex Hsia, David J. Stein, R. D. Nasby, 2005, SPIE Optics + Photonics.

Process and Problems in Developing NATO Tactical Air Doctrine

Robert L. Perry, David J. Stein, Kimberly Nolan, 1988 .

The Development of NATO Tactical Air Doctrine

David J. Stein, 1987 .

USING SMART DUMMY FILL AND SELECTIVE REVERSE ETCHBACK FOR PATTERN DENSITY EQUALIZATION

Duane S. Boning, Brian Lee, David J. Stein, 2000 .

Investigation of the Kinetics of Tungsten Chemical Mechanical Polishing in Potassium Iodate‐Based Slurries: II. Roles of Colloid Species and Slurry Chemistry

David J. Stein, Dale L. Hetherington, D. Hetherington, 1999 .

Investigation of the Kinetics of Tungsten Chemical Mechanical Polishing in Potassium Iodate‐Based Slurries: I. Role of Alumina and Potassium lodate

David J. Stein, Dale L. Hetherington, D. Hetherington, 1999 .