O. Dorsch

Effects of metallic impurities on anisotropic etching of silicon in aqueous KOH-solutions

Ernst Obermeier, A. Hein, O. Dorsch, 1997, Proceedings of International Solid State Sensors and Actuators Conference (Transducers '97).

High-temperature pressure sensor using p-type diamond piezoresistors

E. Obermeier, O. Dorsch, M. Werner, 1995 .

Effect of the silicon content of aqueous KOH on the etching behaviour of convex corners in <100> single crystalline silicon

Ernst Obermeier, A. Hein, O. Dorsch, 1997, Proceedings of International Solid State Sensors and Actuators Conference (Transducers '97).

Dry etching of undoped and boron doped polycrystalline diamond films

E. Obermeier, O. Dorsch, M. Werner, 1995 .