J Wooldridge

Finite Element Analysis of the Vertical Levitation Force in an Electrostatic MEMS Comb Drive Actuator

Markys G. Cain, Mark Stewart, Paul M. Weaver, 2013 .

Vertical comb drive actuator for the measurement of piezoelectric coefficients in small-scale systems

Paul M. Weaver, Markys G. Cain, Mark Stewart, 2013 .