Hironobu Sato

发表

RIE challenges for sub-15 nm line-and-space patterning using directed self-assembly lithography with coordinated line epitaxy (COOL) process

Hitoshi Kubota, Ken Miyagi, Katsuyoshi Kodera, 2015, Advanced Lithography.

Defect-aware process margin for chemo-epitaxial directed self-assembly lithography using simulation method based on self-consistent field theory

Katsuyoshi Kodera, Tomoharu Fujiwara, Tsukasa Azuma, 2014, Advanced Lithography.

Reactive ion etching challenges for half-pitch sub-10-nm line-and-space pattern fabrication using directed self-assembly lithography

Hitoshi Kubota, Katsuyoshi Kodera, Tsukasa Azuma, 2016, SPIE Advanced Lithography.

Contact hole shrink process using directed self-assembly

Takayuki Toshima, Seiji Nagahara, Takahiro Kitano, 2012, Advanced Lithography.

Sub-10nm lines and spaces patterning using grapho-epitaxial directed self-assembly of lamellar block copolymers

Hitoshi Kubota, Katsuyoshi Kodera, Tsukasa Azuma, 2016, SPIE Advanced Lithography.

Grapho-epitaxial sub-10nm line and space patterning using lamellar-forming Si-containing block copolymer

Hitoshi Kubota, Katsuyoshi Kodera, Tsukasa Azuma, 2016, SPIE Advanced Lithography.

Directed self-assembly lithography using coordinated line epitaxy (COOL) process

Hitoshi Kubota, Katsuyoshi Kodera, Tsukasa Azuma, 2015, Advanced Lithography.

Sub-10-nm patterning process using directed self-assembly with high χ block copolymers

Katsuyoshi Kodera, Tomoharu Fujiwara, Tsukasa Azuma, 2015 .

Contact hole shrink process using graphoepitaxial directed self-assembly lithography

Takayuki Toshima, Seiji Nagahara, Takahiro Kitano, 2013 .

Properties and surface morphology of indium tin oxide films prepared by electron shower method

Hisami Yumoto, Hironobu Sato, Tuneo Watanabe, 1993 .

3D sheath flow using hydrodynamic position control of the sample flow

Shuichi Shoji, Daisuke Yagyu, Hironobu Sato, 2007 .

A simulation study for defects in sub-15 nm line-space using directed self-assembly

Katsuyoshi Kodera, Tomoharu Fujiwara, Tsukasa Azuma, 2015 .

Application of Directed Self‐Assembly Lithography to Semiconductor Device Manufacturing Process

Hirokazu Kato, Tsukasa Azuma, Yuriko Seino, 2015 .

Three-dimensional micro-structures consisting of high aspect ratio inclined micro-pillars fabricated by simple photolithography

Shuichi Shoji, Hironobu Sato, H. Sato, 2004 .

Improved inclined multi-lithography using water as exposure medium and its 3D mixing microchannel application

Shuichi Shoji, Daisuke Yagyu, Hironobu Sato, 2006 .

Directed self-assembly lithography for half-pitch sub-15 nm pattern fabrication process

Katsuyoshi Kodera, Tomoharu Fujiwara, Tsukasa Azuma, 2015 .

Status of X-ray microcalorimeter development at ISAS

Yoshitaka Ishisaki, Tetsuya Osaka, Yoh Takei, 2001 .

Performance analyses of TES microcalorimeters with mushroom shaped X-ray absorbers made of Sn or Bi

Ryuichi Fujimoto, Yoshitaka Ishisaki, Tetsuya Osaka, 2004 .

EHD Micro Pump using Pyrolyzed Polymer 3-D Carbon Mesh Electrodes

Satoshi Konishi, Shuichi Shoji, Naoki Imai, 2009, 2009 IEEE 22nd International Conference on Micro Electro Mechanical Systems.

Electrical Via Chain Yield for DSA Contact Hole Shrink Process

Hirokazu Kato, Tsukasa Azuma, Mitsuhiro Omura, 2013 .

A novel fabrication of in-channel 3-D micromesh structure using maskless multi-angle exposure and its microfilter application

Jeung Sang Go, Shuichi Shoji, Hironobu Sato, 2003, The Sixteenth Annual International Conference on Micro Electro Mechanical Systems, 2003. MEMS-03 Kyoto. IEEE.

In-channel 3-D micromesh structures using maskless multi-angle exposures and their microfilter application

Jeung Sang Go, Shuichi Shoji, Hironobu Sato, 2004 .

Optimal Design of the Micromixer using Nonhomogeneous Multilayer Laminar Flow

Satoshi Sugiura, Hiroaki Nakanishi, Shuichi Shoji, 2002 .

A novel simple sub-15nm line-and-space patterning process flow using directed self-assembly technology

Katsuyoshi Kodera, Tomoharu Fujiwara, Tsukasa Azuma, 2015 .

Sub-30nm via interconnects fabricated using directed self-assembly

Hirokazu Kato, Tsukasa Azuma, Mitsuhiro Omura, 2013 .

An all SU-8 microfluidic chip with built-in 3D fine microstructures

Shuichi Shoji, Hironobu Sato, S. Shoji, 2006 .