Sangwon Ryu

Design of a self-tuning adaptive model predictive controller using recursive model parameter estimation for real-time plasma variable control

Junmo Koo, Damdae Park, Sangwon Ryu, 2019, Comput. Chem. Eng..

Online System Identification for the Real Time Control of the Plasma Parameters

Junmo Koo, Damdae Park, Sangwon Ryu, 2018 .

Recursive Model Estimation for the Plasma Parameters Quality Control

Junmo Koo, Damdae Park, Sangwon Ryu, 2018 .

Design of optical emission spectroscopy based plasma parameter controller for real-time advanced equipment control

Chonghun Han, Hyun-Joon Roh, Kye Hyun Baek, 2017, Comput. Chem. Eng..

Determination of electron energy probability function in low-temperature plasmas from current – Voltage characteristics of two Langmuir probes filtered by Savitzky–Golay and Blackman window methods

Hyun-Joon Roh, Nam-Kyun Kim, Sangwon Ryu, 2015 .

Enhancement of the Virtual Metrology Performance for Plasma-Assisted Oxide Etching Processes by Using Plasma Information (PI) Parameters

Hyun-Joon Roh, Sangwon Ryu, Gon-Ho Kim, 2015, IEEE Transactions on Semiconductor Manufacturing.