Do Hyun Cho

Electrical defect SEM review under the various electric circumstances on SAC layer

Jeong-Ho Yeo, Byoung-Ho Lee, Tae Yong Lee, 2004, SPIE Advanced Lithography.

Experimental study of contact edge roughness on sub-100 nm various circular shapes

Byoung-Ho Lee, Tae Yong Lee, Dongchul Ihm, 2005, SPIE Advanced Lithography.

Optical characterization of defects on patterned wafers: exploring light polarization

Jeong-Ho Yeo, Byoung-Ho Lee, Silviu Reinhorn, 2004, SPIE Advanced Lithography.