G. Hergenhan

EUV sources for EUV lithography in alpha-, beta-, and high volume chip manufacturing: an update on GDPP and LPP technology

J. Ringling, U. Stamm, J. Kleinschmidt, 2005, SPIE Advanced Lithography.

Development status of gas discharge produced plasma Z-pinch EUV sources for use in beta-tools and high volume chip manufacturing tools

J. Ringling, U. Stamm, J. Kleinschmidt, 2005, SPIE Advanced Lithography.

Development status of EUV sources for use in beta-tools and high-volume chip manufacturing tools

U. Stamm, J. Kleinschmidt, G. Hergenhan, 2006, SPIE Advanced Lithography.