Shuzo Ohshio

Feasibility study of character projection-based electron-beam direct writing for logic LSI wiring including automatically routed area with 14nm node technology case

Masaru Ito, Shinji Sugatani, Takashi Maruyama, 2012, Advanced Lithography.

Practical study on the electron-beam-only alignment strategy for the electron beam direct writing technology

Shinji Sugatani, Yasushi Takahashi, Yoshinori Kojima, 2013, Advanced Lithography.

Study of device mass production capability of the character projection based electron beam direct writing process technology toward 14 nm node and beyond

Yoshio Ito, Shinji Sugatani, Yasushi Takahashi, 2012, Advanced Lithography.

Study of device mass production capability of the character projection based electron beam direct writing process technology toward 14 nm node and beyond

Yoshio Ito, Shinji Sugatani, Yasushi Takahashi, 2012 .