Mari Ylönen

In situ boron-doped LPCVD polysilicon with low tensile stress for MEMS applications

Hannu Kattelus, Mari Ylönen, Altti Torkkeli, 2003 .

Amorphous metal alloy based MEMS for RF applications

Hannu Kattelus, Tauno Vähä-Heikkilä, Mari Ylönen, 2006 .