Prem Pal

发表

MEMS components with perfectly protected edges and corners in Si{110} wafers

Kazuo Sato, Hirotaka Hida, Prem Pal, 2011, 2011 International Symposium on Micro-NanoMechatronics and Human Science.

Reliability assessment of the complete 3D etch rate distribution of Si in anisotropic etchants based on vertically micromachined wagon wheel samples

Kazuo Sato, Néstor Ferrando, Prem Pal, 2011 .

Microstructures with rounded concave and sharp-edged convex corners in a single step wet anisotropic etching

Mitsuhiro Shikida, Kazuo Sato, Prem Pal, 2008, SPIE MOEMS-MEMS.

Experimental procurement of the complete 3D etch rate distribution of Si in anisotropic etchants based on vertically micromachined wagon wheel samples

Kazuo Sato, Néstor Ferrando, Hirotaka Hida, 2011 .

A measurement free pre-etched pattern to identify the <110> directions on Si{110} wafer

Ashok Kumar Pandey, Prem Pal, Sajal Sagar Singh, 2017 .

Front-to-Back Alignment Techniques in Microelectronics/MEMS Fabrication: A Review

Sudhir Chandra, Prem Pal, Yong-Jun Kim, 2006 .

Complex three-dimensional structures in Si{1 0 0} using wet bulk micromachining

Prem Pal, P. Pal, Kazuo Sato, 2009 .

Particle swarm optimization-based continuous cellular automaton for the simulation of deep reactive ion etching

Miguel A. Gosálvez, Yan Xing, Prem Pal, 2015 .

Precise identification of <1 0 0> directions on Si{0 0 1} wafer using a novel self-aligning pre-etched technique

Ashok Kumar Pandey, Prem Pal, P. Pal, 2016 .

Wet etched complex three dimensional MEMS structures

Prem Pal, Kazuo Sato, 2009, 2009 International Symposium on Micro-NanoMechatronics and Human Science.

A novel process for perfect convex corner realization in bulk micromachining

Sudhir Chandra, Prem Pal, P. Pal, 2004 .

Atomistic mechanism for the macroscopic effects induced by small additions of surfactants to alkaline etching solutions

Bin Tang, Prem Pal, M. Gosálvez, 2010 .

Propane ammoxidation over gallium-modified MFI zeolites

Prem Pal, Eric G. Derouane, S. B. A. Hamid, 2001 .

Characterization of ZnO Thin Films

Sudhir Chandra, Rashmi, Prem Pal, 2005 .

Recessed Microstructures with Perfect Convex Corners for Accelerometers

Sudhir Chandra, Prem Pal, P. Pal, 2004 .

Study of corner compensating structures and fabrication of various shapes of MEMS structures in pure and surfactant added TMAH

Mitsuhiro Shikida, Prem Pal, M. Shikida, 2009 .

A simple and robust model to explain convex corner undercutting in wet bulk micromachining

Prem Pal, Sajal Sagar Singh, 2013 .

Interface study of bonded wafers by digitized linear frequency modulated thermal wave imaging

Suneet Tuli, Ravibabu Mulaveesala, Prem Pal, 2006 .

A detailed investigation and explanation of the appearance of different undercut profiles in KOH and TMAH

Prem Pal, Sajal Singh, S. Haldar, 2014 .

Simulating anisotropic etching of silicon in any etchant: evolutionary algorithm for the calibration of the continuous cellular automaton

Miguel A. Gosálvez, Néstor Ferrando, R. Gadea, 2011 .

Reconstructing the 3D etch rate distribution of silicon in anisotropic etchants using data from vicinal {1 0 0}, {1 1 0} and {1 1 1} surfaces

Miguel A. Gosálvez, Prem Pal, M. Gosálvez, 2011 .

A New Model for the Etching Characteristics of Corners Formed by Si{111} Planes on Si{110} Wafer Surface

Prem Pal, Sajal Sagar Singh, P. Pal, 2013 .

Study of rounded concave and sharp edge convex corners undercutting in CMOS compatible anisotropic etchants

Mitsuhiro Shikida, Prem Pal, M. Shikida, 2007 .

Anisotropic etching on Si{1 1 0}: experiment and simulation for the formation of microstructures with convex corners

Miguel A. Gosálvez, Yan Xing, Prem Pal, 2014 .

Bulk-micromachined structures inside anisotropically etched cavities

Sudhir Chandra, Prem Pal, P. Pal, 2004 .

A New Technique of Front-To-Back Alignment for MEMS

Suneet Tuli, Sudhir Chandra, Prem Pal, 2004 .

Fabrication methods based on wet etching process for the realization of silicon MEMS structures with new shapes

Prem Pal, P. Pal, Kazuo Sato, 2010, DTIP 2010.

Fabrication of novel microstructures based on orientation-dependent adsorption of surfactant molecules in a TMAH solution

Miguel A. Gosálvez, Mitsuhiro Shikida, Bin Tang, 2010 .

Removal probability function for Kinetic Monte Carlo simulations of anisotropic etching of silicon in alkaline etchants containing additives

Miguel A. Gosálvez, Hui Zhang, Yan Xing, 2015 .

Smoothness Control of Wet Etched Si{100} Surfaces in TMAH+Triton

Bin Tang, Prem Pal, P. Pal, 2014 .

Various shapes of silicon freestanding microfluidic channels and microstructures in one-step lithography

Prem Pal, P. Pal, Kazuo Sato, 2009 .