Sakae Matsuzaki

LSI Design for Sensing Data Transmission by Interruption in Tactile Sensor Systems

Yutaka Nonomura, Masayoshi Esashi, Shuji Tanaka, 2009 .

Anodic Bonding between LTCC Substrate and Si Substrate with Electrical Connections

Masayoshi Esashi, Shuji Tanaka, Sakae Matsuzaki, 2011 .

A Simulated Network System Prototype for Development of a Networked Tactile Sensor System with Integrated MEMS-LSI Tactile Sensors

Yutaka Nonomura, Masayoshi Esashi, Shuji Tanaka, 2012 .

Development of an LSI for Tactile Sensor Systems on the Whole-Body of Robots

Yutaka Nonomura, Masayoshi Esashi, Shuji Tanaka, 2011 .

LSI-based amperometric sensor for bio-imaging and multi-point biosensing.

Masayoshi Esashi, Atsushi Suda, Shinya Yoshida, 2012, Lab on a chip.

Integration and packaging technology of MEMS-on-CMOS capacitive tactile sensor for robot application using thick BCB isolation layer and backside-grooved electrical connection

Yutaka Nonomura, Masayoshi Esashi, Shuji Tanaka, 2012 .

Adhesive wafer bonding using a molded thick benzocyclobutene layer for wafer-level integration of MEMS and LSI

Yutaka Nonomura, Masayoshi Esashi, Shuji Tanaka, 2011 .