Andrew R. Neureuther
发表
David M. Newmark,
Eric Tomacruz,
Sheila Vaidya,
1994,
Advanced Lithography.
Konstantinos Adam,
Andrew R. Neureuther,
Michael Lam,
2003,
SPIE Advanced Lithography.
Kenneth A. Goldberg,
Laura Waller,
Patrick P. Naulleau,
2015,
Advanced Lithography.
Andrew R. Neureuther,
Michael C. Lam,
A. Neureuther,
2006,
SPIE Photomask Technology.
Andrew R. Neureuther,
Pankaj Kumar Jain,
William G. Oldham,
1981,
Advanced Lithography.
Laura Waller,
Patrick P. Naulleau,
Andrew R. Neureuther,
2014,
Photomask Technology.
Andrew R. Neureuther,
Juliet Rubinstein,
2009,
Advanced Lithography.
Patrick P. Naulleau,
Eric M. Gullikson,
Ranganath Teki,
2013,
Photomask Technology.
Robert John Socha,
Andrew R. Neureuther,
Christopher J. Progler,
1997,
Advanced Lithography.
Andrew R. Neureuther,
Chang Hsu,
Rona Yang,
1998,
Advanced Lithography.
Patrick P. Naulleau,
Andrew R. Neureuther,
Luke Long,
2018,
Photomask Technology.
Donald C. Hofer,
Andrew R. Neureuther,
C. Grant Willson,
1984,
Advanced Lithography.
Andrew R. Neureuther,
Kenny K.H. Toh,
A. Neureuther,
1987,
Advanced Lithography.
Andrew R. Neureuther,
Juliet Rubinstein,
2008,
SPIE Advanced Lithography.
Patrick P. Naulleau,
Andrew R. Neureuther,
Suchit Bhattarai,
2015,
Advanced Lithography.
Andrew R. Neureuther,
Michael S. Yeung,
John Joseph Helmsen,
1994,
Advanced Lithography.
Xiaofan Meng,
Mike V. Williamson,
Andrew R. Neureuther,
2002,
SPIE Advanced Lithography.
Kenneth A. Goldberg,
Iacopo Mochi,
Andrew R. Neureuther,
2009,
Photomask Technology.
Kenneth A. Goldberg,
Patrick P. Naulleau,
Andrew R. Neureuther,
2014,
Photomask Technology.
Yunfei Deng,
Andrew R. Neureuther,
Matthew J. Brukman,
2000,
Advanced Lithography.
Andrew R. Neureuther,
Gregory McIntyre,
2004,
SPIE Advanced Lithography.
Andrew R. Neureuther,
Mark D. Prouty,
1984,
Advanced Lithography.
Andrew R. Neureuther,
Wojtek J. Poppe,
Gregory McIntyre,
2006,
SPIE Advanced Lithography.
Andrew R. Neureuther,
William G. Oldham,
Wingyu Leung,
1983,
Advanced Lithography.
Andrew R. Neureuther,
Shankar Subramanian,
Philip D. Flanner,
1986,
Advanced Lithography.
Thomas V. Pistor,
Patrick P. Naulleau,
Andrew R. Neureuther,
2017,
Advanced Lithography.
Andrew R. Neureuther,
Michael C. Lam,
2006,
SPIE Advanced Lithography.
Andrew R. Neureuther,
Juliet Holwill,
2007,
SPIE Advanced Lithography.
Chong-Cheng Fu,
R. Fabian Pease,
Andrew R. Neureuther,
1988,
Advanced Lithography.
Patrick P. Naulleau,
Andrew R. Neureuther,
Stuart Sherwin,
2017
.
Contrast curves for low energy electron exposures of an EUV resist in a scanning electron microscope
Patrick P. Naulleau,
Andrew R. Neureuther,
Suchit Bhattarai,
2017,
Advanced Lithography.
Andrew R. Neureuther,
Kenny K.H. Toh,
1991,
Other Conferences.
Andrew R. Neureuther,
Gregory McIntyre,
2004,
SPIE Advanced Lithography.
Kenneth A. Goldberg,
Patrick P. Naulleau,
Antoine Wojdyla,
2015,
Advanced Lithography.
Andrew R. Neureuther,
C. H. Ting,
William G. Oldham,
1982,
Advanced Lithography.
Andrew R. Neureuther,
Alfred K. K. Wong,
A. Neureuther,
1993,
Photomask Technology.
Andrew R. Neureuther,
Michael C. Lam,
2004,
SPIE Photomask Technology.
Andrew R. Neureuther,
Michael C. Lam,
2005,
SPIE Advanced Lithography.
Avideh Zakhor,
Olav Solgaard,
Vivek Subramanian,
2008
.
Patrick P. Naulleau,
Andrew R. Neureuther,
Weilun Chao,
2014,
Advanced Lithography.
Patrick P. Naulleau,
Andrew R. Neureuther,
Yow-Gwo Wang,
2016,
SPIE Advanced Lithography.
Kenneth A. Goldberg,
Patrick P. Naulleau,
Eric M. Gullikson,
2014,
Photomask and Next Generation Lithography Mask Technology.
Stephen Hsu,
Patrick P. Naulleau,
Robert John Socha,
2017,
Advanced Lithography.
Andrew R. Neureuther,
William E. Haller,
1988,
Advanced Lithography.
Erik H. Anderson,
Andrew R. Neureuther,
Wojtek J. Poppe,
2006,
SPIE Advanced Lithography.
Andrew R. Neureuther,
William G. Oldham,
Anton K. Pfau,
1991,
Other Conferences.
Andrew R. Neureuther,
Chris H. Clifford,
Tina T. Chan,
2010,
Advanced Lithography.
Andrew R. Neureuther,
William N. Partlo,
William G. Oldham,
1989,
Advanced Lithography.
Andrew R. Neureuther,
Gregory McIntyre,
2003,
SPIE Photomask Technology.
Patrick P. Naulleau,
Andrew R. Neureuther,
Yow-Gwo Wang,
2017
.
Andrew R. Neureuther,
C. Grant Willson,
Donald C. Hofer,
1982,
Advanced Lithography.
Patrick P. Naulleau,
Andrew R. Neureuther,
Suchit Bhattarai,
2014,
Advanced Lithography.
Andrew R. Neureuther,
Gregory McIntyre,
Patrick Reynolds,
2006,
SPIE Advanced Lithography.
Andrew R. Neureuther,
Gregory McIntyre,
2003,
SPIE Advanced Lithography.
Richard A. Ferguson,
Andrew R. Neureuther,
Ronald M. Martino,
1995,
Advanced Lithography.
Konstantinos Adam,
Thomas V. Pistor,
Robert John Socha,
1997,
Advanced Lithography.
Andrew R. Neureuther,
Chris Clifford,
2008,
Photomask Technology.
Kenneth A. Goldberg,
Patrick P. Naulleau,
Antoine Wojdyla,
2015,
SPIE Photomask Technology.
Patrick P. Naulleau,
Andrew R. Neureuther,
Stuart Sherwin,
2018,
Advanced Lithography.
Mike V. Williamson,
Andrew R. Neureuther,
2004,
SPIE Advanced Lithography.
Lei Yuan,
Andrew R. Neureuther,
2002,
SPIE Advanced Lithography.
Patrick P. Naulleau,
Andrew R. Neureuther,
Suchit Bhattarai,
2016,
SPIE Advanced Lithography.
Kenneth A. Goldberg,
Laura Waller,
Patrick P. Naulleau,
2015,
Advanced Lithography.
Andrew R. Neureuther,
William G. Oldham,
K. K. H. Toh,
1989,
Advanced Lithography.
Konstantinos Adam,
Andrew R. Neureuther,
2000,
Advanced Lithography.
Andrew R. Neureuther,
Scott J. Hafeman,
2003,
SPIE Advanced Lithography.
Andrew R. Neureuther,
C. Grant Willson,
Takuya Ogawa,
1998,
Advanced Lithography.
Yunfei Deng,
Andrew R. Neureuther,
2002,
SPIE Advanced Lithography.
Andrew R. Neureuther,
Gregory McIntyre,
2006,
SPIE Photomask Technology.
Costas J. Spanos,
Andrew R. Neureuther,
Jing Xue,
2008,
SPIE Advanced Lithography.
Mike V. Williamson,
Andrew R. Neureuther,
2000,
Advanced Lithography.
Patrick P. Naulleau,
Andrew R. Neureuther,
Weilun Chao,
2015,
Advanced Lithography.
Mike V. Williamson,
Andrew R. Neureuther,
2003,
SPIE Advanced Lithography.
Zoran Krivokapic,
Robert John Socha,
Andrew R. Neureuther,
1995,
Advanced Lithography.
Andrew R. Neureuther,
Takeshi Doi,
Karim H. Tadros,
1991,
Other Conferences.
Harry J. Levinson,
Andrew R. Neureuther,
Willard E. Conley,
1995
.
Lei Yuan,
Andrew R. Neureuther,
2003,
SPIE Advanced Lithography.
Kenneth A. Goldberg,
Iacopo Mochi,
Andrew R. Neureuther,
2009,
Advanced Lithography.
Jae-Seok Yang,
Andrew R. Neureuther,
2008,
ISQED 2008.
Mike V. Williamson,
Andrew R. Neureuther,
2004
.
Patrick P. Naulleau,
Andrew R. Neureuther,
Yow-Gwo Wang,
2017
.
Andrew R. Neureuther,
Gregory McIntyre,
Garth Robbins,
2005,
SPIE Optics + Photonics.
Robert John Socha,
Andrew R. Neureuther,
A. Neureuther,
1995,
Advanced Lithography.
Lei Yuan,
Andrew R. Neureuther,
2004,
SPIE Advanced Lithography.
Andrew R. Neureuther,
Chris Clifford,
2008,
SPIE Advanced Lithography.
Andrew R. Neureuther,
Wojtek J. Poppe,
Juliet Rubinstein,
2009,
Advanced Lithography.
Yunfei Deng,
Andrew R. Neureuther,
2002,
SPIE Advanced Lithography.
Khanh Nguyen,
Andrew R. Neureuther,
David T. Attwood,
1993,
Advanced Lithography.
Luke T. Long,
Patrick P. Naulleau,
Andrew R. Neureuther,
2021,
Advanced Lithography.
Luke T. Long,
Patrick P. Naulleau,
Andrew R. Neureuther,
2021,
Journal of Micro/Nanopatterning, Materials, and Metrology.
Andrew R. Neureuther,
Patrick Naulleau,
Luke Long,
2021,
Advanced Lithography.
Andrew R. Neureuther,
Douglas S. Goodman,
Michael G. Rosenfield,
1985
.
Yunfei Deng,
Andrew R. Neureuther,
A. Neureuther,
2000
.
Ioannis G. Karafyllidis,
Andrew R. Neureuther,
Paul Isaac Hagouel,
1999
.
Erik H. Anderson,
Andrew R. Neureuther,
Wojtek J. Poppe,
2006
.
Andrew R. Neureuther,
1978
.
Patrick P. Naulleau,
Andrew R. Neureuther,
Suchit Bhattarai,
2017
.
Alfred K. K. Wong,
Andrew R. Neureuther,
A. Neureuther,
1992,
Advanced Lithography.
Konstantinos Adam,
Garth Robins,
Andrew R. Neureuther,
2002
.
Andrew R. Neureuther,
A. Neureuther,
1980
.
Andrew R. Neureuther,
Victor Wen,
Owen Carmichael,
1998
.
Andrew R. Neureuther,
Gregory McIntyre,
2005
.
Andrew R. Neureuther,
Chenming Hu,
K. W. Terrill,
1984
.
Konstantinos Adam,
Thomas V. Pistor,
Andrew R. Neureuther,
1998
.
Andrew R. Neureuther,
R. Jewett,
T. Van Duzer,
1977
.
Ioannis G. Karafyllidis,
Andrew R. Neureuther,
P. I. Hagouel,
1998
.
Andrew R. Neureuther,
William G. Oldham,
John L. Reynolds,
1979
.
Andrew R. Neureuther,
C. Grant Willson,
1988
.
Andrew R. Neureuther,
P. Flanner,
S. Shen,
1987
.
Yunfei Deng,
Andrew R. Neureuther,
A. Neureuther,
2002
.
Andrew R. Neureuther,
C. H. Ting,
A. Neureuther,
1979
.
Konstantinos Adam,
Thomas V. Pistor,
Robert John Socha,
1998
.
Konstantinos Adam,
Andrew R. Neureuther,
Shoji Hotta,
2000
.
Ying Li,
Andrew R. Neureuther,
Linyong Pang,
2010,
Photomask Technology.
Patrick P. Naulleau,
Andrew R. Neureuther,
Suchit Bhattarai,
2017
.
Andrew R. Neureuther,
William G. Oldham,
S. Subramanian,
1981
.
Harry J. Levinson,
Andrew R. Neureuther,
Gregory McIntyre,
2005
.
R. Guerrieri,
Andrew R. Neureuther,
A. Neureuther,
1989
.
Ioannis G. Karafyllidis,
Andrew R. Neureuther,
P. I. Hagouel,
1998
.
Andrew R. Neureuther,
A. Neureuther,
T. Pistor,
1999
.
Andrew R. Neureuther,
Chris H. Clifford,
2008
.
Andrew R. Neureuther,
1992
.
Andrew R. Neureuther,
Marco Antonio Zuniga,
1997
.
Andrew R. Neureuther,
Gregory McIntyre,
2005
.
Andrew R. Neureuther,
P. I. Hagouel,
Andrew M. Zenk,
1996
.
Kenneth A. Goldberg,
Iacopo Mochi,
Andrew R. Neureuther,
2009
.
Patrick P. Naulleau,
Andrew R. Neureuther,
Christopher N. Anderson,
2016
.
Andrew R. Neureuther,
Chris Clifford,
2009
.
Andrew R. Neureuther,
Greg McIntyre,
2003
.
Mosong Cheng,
Ebo H. Croffie,
Andrew R. Neureuther,
1999
.
Konstantinos Adam,
Andrew R. Neureuther,
2002
.
Andrew R. Neureuther,
William G. Oldham,
1986
.
Mosong Cheng,
Ebo H. Croffie,
Andrew R. Neureuther,
2000
.
Richard A. Ferguson,
Andrew R. Neureuther,
Nelson Tam,
1990
.
Gregory M. Wallraff,
Andrew R. Neureuther,
E. Tomacruz,
1993
.
Mike V. Williamson,
Andrew R. Neureuther,
2000
.
Patrick P. Naulleau,
Mark Neisser,
Andrew R. Neureuther,
2014
.
Andrew R. Neureuther,
Taro Ogawa,
Charles H. Fields,
1998
.
Andrew R. Neureuther,
Garth C. Robins,
2003
.
Patrick P. Naulleau,
Andrew R. Neureuther,
Jonathan H. Ma,
2019,
Extreme Ultraviolet (EUV) Lithography X.
Elad Alon,
Borivoje Nikolic,
Andrew R. Neureuther,
2008,
SPIE Advanced Lithography.
Mosong Cheng,
Ebo H. Croffie,
Andrew R. Neureuther,
2000
.
Kenneth A. Goldberg,
Laura Waller,
Jonathan Dong,
2016
.
Andrew R. Neureuther,
Nelson Tam,
Rick D. Coyne,
1988
.
Andrew R. Neureuther,
E. W. Scheckler,
D. M. Hoffstetter,
1991,
1991 Symposium on VLSI Technology.
Patrick P. Naulleau,
Andrew R. Neureuther,
Christopher N. Anderson,
2014
.
Mosong Cheng,
Ebo H. Croffie,
Andrew R. Neureuther,
2000
.
Kenneth A. Goldberg,
Patrick P. Naulleau,
Mark Neisser,
2015
.
Costas J. Spanos,
Andrew R. Neureuther,
N. N. Tam,
1991
.