Marie Angelopoulos
发表
Hiroshi Ito,
Vivek M. Prabhu,
Michael X. Wang,
2004,
SPIE Advanced Lithography.
Wen-li Wu,
Eric K. Lin,
Marie Angelopoulos,
2001,
SPIE Advanced Lithography.
Wen-li Wu,
Vivek M. Prabhu,
Eric K. Lin,
2003,
SPIE Advanced Lithography.
Marie Angelopoulos,
Karen Petrillo,
David R. Medeiros,
2002,
Photomask Technology.
Michael J. Lercel,
Marie Angelopoulos,
Wu-Song Huang,
2001,
SPIE Photomask Technology.
Marie Angelopoulos,
David R. Medeiros,
Arpan P. Mahorowala,
2001,
IBM J. Res. Dev..
Marie Angelopoulos,
John P. Simons,
Qinghuang Lin,
1998,
Advanced Lithography.
Marie Angelopoulos,
David R. Medeiros,
Jean M. J. Frechet,
2000,
Advanced Lithography.
Gregory Breyta,
Richard A. Di Pietro,
Donald C. Hofer,
1999,
Advanced Lithography.
Wei He,
Marie Angelopoulos,
Karen Petrillo,
2003,
Photomask Japan.
Scott Halle,
Timothy A. Brunner,
Marie Angelopoulos,
2003,
SPIE Advanced Lithography.
Andrew J. Watts,
Marie Angelopoulos,
Karen Petrillo,
2002,
Photomask Japan.
Hiroshi Ito,
Marie Angelopoulos,
Karen Petrillo,
1998,
Photomask Technology.
Marie Angelopoulos,
David R. Medeiros,
Wu-Song Huang,
1999,
Advanced Lithography.
Marie Angelopoulos,
C. Grant Willson,
Eric K. Lin,
2002,
SPIE Advanced Lithography.
Marie Angelopoulos,
C. Grant Willson,
Gerard M. Schmid,
2003,
SPIE Advanced Lithography.
Marie Angelopoulos,
Maggie A. Z. Hupcey,
Jeffrey D. Gelorme,
1998,
Advanced Lithography.
Wen-li Wu,
Eric K. Lin,
Dario L. Goldfarb,
2001,
SPIE Advanced Lithography.
Vivek M. Prabhu,
Wen-Li Wu,
Dario L. Goldfarb,
2003,
SPIE Advanced Lithography.
Donald C. Hofer,
Gregory M. Wallraff,
Timothy A. Brunner,
1998,
Advanced Lithography.
Marie Angelopoulos,
David R. Medeiros,
Arpan P. Mahorowala,
2001,
Photomask Japan.
Daniel Herr,
Marie Angelopoulos,
Kenneth E. Gonsalves,
2002
.
Wen-li Wu,
Vivek M. Prabhu,
Dario L. Goldfarb,
2003,
SPIE Advanced Lithography.
Marie Angelopoulos,
Wayne M. Moreau,
K. Rex Chen,
1997,
Advanced Lithography.
Marie Angelopoulos,
Arthur J. Epstein,
J. M. Ginder,
1987
.
Marie Angelopoulos,
Yun-Hsin Liao,
Bruce K. Furman,
1995,
Optics & Photonics.
Marie Angelopoulos,
Karen Petrillo,
David R. Medeiros,
2001,
SPIE Advanced Lithography.
Wen-li Wu,
Eric K. Lin,
Dario L. Goldfarb,
1999,
Nature.
Marie Angelopoulos,
Qinghuang Lin,
Dario L. Goldfarb,
2001,
SPIE Advanced Lithography.
Inna V. Babich,
Marie Angelopoulos,
Karen Petrillo,
1998,
Advanced Lithography.
Marie Angelopoulos,
Karen Petrillo,
David R. Medeiros,
2002,
SPIE Photomask Technology.
Marie Angelopoulos,
Karen Petrillo,
David R. Medeiros,
2001,
SPIE Advanced Lithography.
Marie Angelopoulos,
Sean D. Burns,
Margaret C. Lawson,
2004,
SPIE Advanced Lithography.
Richard A. Di Pietro,
Donald C. Hofer,
Gregory M. Wallraff,
2000,
Advanced Lithography.
Wen-li Wu,
Vivek M. Prabhu,
Bryan D. Vogt,
2004,
SPIE Advanced Lithography.
Richard A. Di Pietro,
Donald C. Hofer,
Gregory M. Wallraff,
1998,
Advanced Lithography.
Hiroshi Ito,
Vivek M. Prabhu,
Erin L. Jablonski,
2004,
SPIE Advanced Lithography.
Dario L. Goldfarb,
Marie Angelopoulos,
Sean D. Burns,
2004,
SPIE Advanced Lithography.
Hiroshi Ito,
Martha I. Sanchez,
Gregory M. Wallraff,
2003,
SPIE Advanced Lithography.
Wen-li Wu,
Dario L. Goldfarb,
Marie Angelopoulos,
2003,
SPIE Advanced Lithography.
Marie Angelopoulos,
J. Campbell Scott,
Siegfried Karg,
1997,
Photonics West.
John G. Hartley,
Marie Angelopoulos,
Wu-Song Huang,
2000,
Advanced Lithography.
Marie Angelopoulos,
Karen Petrillo,
Wenjie Li,
2002,
SPIE Photomask Technology.
Marie Angelopoulos,
Jane M. Shaw,
Jeffrey D. Gelorme,
2000,
Advanced Lithography.
Hans Willy Becker,
Marie Angelopoulos,
Ute Buttgereit,
2003,
SPIE Photomask Technology.
Marie Angelopoulos,
Jeffrey A. Leavey,
Raul E. Acosta,
1998,
Advanced Lithography.
John G. Hartley,
Marie Angelopoulos,
Wu-Song Huang,
2000,
Photomask Japan.
Kenneth C. Racette,
Marie Angelopoulos,
Kurt R. Kimmel,
2001,
SPIE Advanced Lithography.
Scott Halle,
Marie Angelopoulos,
Qinghuang Lin,
2001,
SPIE Advanced Lithography.
Applicaton of blends and side chain Si-O copolymers as high-etch-resistant sub-100-nm e-beam resists
Marie Angelopoulos,
Karen Petrillo,
Qinghuang Lin,
2002,
SPIE Advanced Lithography.
Hans Willy Becker,
Marie Angelopoulos,
Ute Buttgereit,
2004,
Photomask Japan.
Marie Angelopoulos,
John P. Simons,
Qinghuang Lin,
2002,
SPIE Advanced Lithography.
Marie Angelopoulos,
M. Angelopoulos,
2001,
IBM J. Res. Dev..
Marie Angelopoulos,
John P. Simons,
Chris Robinson,
2001,
SPIE Advanced Lithography.
Highly etch-selective spin-on bottom antireflective coating for use in 193-nm lithography and beyond
Scott Halle,
Marie Angelopoulos,
Karen Petrillo,
2003,
SPIE Advanced Lithography.
Scott Halle,
Marie Angelopoulos,
Alfred Grill,
2001,
SPIE Advanced Lithography.
Marie Angelopoulos,
Karen Petrillo,
James J. Bucchignano,
1998
.
Wen-li Wu,
Eric K. Lin,
Dario L. Goldfarb,
2001
.
Wen-li Wu,
Eric K. Lin,
Marie Angelopoulos,
2003
.
Wei He,
Marie Angelopoulos,
Wu-Song Huang,
2002
.
Wen-Li Wu,
Marie Angelopoulos,
Brian C. Trinque,
2002,
Science.
Marie Angelopoulos,
Jane M. Shaw,
Michel Tissier,
1991
.
Wen-li Wu,
Eric K. Lin,
Dario L. Goldfarb,
2001
.
Marie Angelopoulos,
Jane M. Shaw,
Nancy C. LaBianca,
1993
.
Marie Angelopoulos,
Jane M. Shaw,
J. Shaw,
1989
.
Wen-Li Wu,
Marie Angelopoulos,
Sharadha Sambasivan,
2005,
Langmuir : the ACS journal of surfaces and colloids.
Wen-li Wu,
Eric K. Lin,
Dario L. Goldfarb,
2004
.
Juan J. de Pablo,
Dario L. Goldfarb,
Marie Angelopoulos,
2000
.
Donald C. Hofer,
Marie Angelopoulos,
John P. Simons,
2000
.
Gregg M. Gallatin,
Dario L. Goldfarb,
Marie Angelopoulos,
2004
.
Vivek M. Prabhu,
Eric K. Lin,
Wen-Li Wu,
2004
.
Marie Angelopoulos,
Jane M. Shaw,
Niranjan M. Patel,
1993
.
Marie Angelopoulos,
Teresita Ordonez Graham,
M. Angelopoulos,
1997
.
Wen-li Wu,
Marie Angelopoulos,
Chia-Ying Wang,
2004,
Langmuir : the ACS journal of surfaces and colloids.
Marie Angelopoulos,
Siegfried Karg,
J. C. Scott,
1997
.
Marie Angelopoulos,
David R. Medeiros,
Wu-Song Huang,
1999
.