Koichi Sawamoto

Active Control of Pneumatic Isolation Table with Spool Type Servo Valve and Quick Response Laminar Flow Sensor

Kenji Kawashima, Toshiharu Kagawa, Tomonori Kato, 2006 .

Realization of virtual sub chamber on active controlled pneumatic isolation table with pressure differentiator

Kenji Kawashima, Toshiharu Kagawa, Tomonori Kato, 2007 .

CONTROL OF A VIBRATION ISOLATION SYSTEM USING PRESSURE DIFFERENTIATORS AND SPOOL TYPE SERVO VALUES

Kenji Kawashima, Toshiharu Kagawa, Tomonori Kato, 2005 .

Active control of a pneumatic isolation table using model following control and a pressure differentiator

Kenji Kawashima, Toshiharu Kagawa, Tomonori Kato, 2007 .