J R. Lowney

Semiconductor Measurement Technology: User's Manual for the Program MONSEL-I: Monte Carlo Simulation of SEM Signals for Linewidth Metrology

E Marx, J R. Lowney, 1994 .

Application of Monte Carlo Simulations to Critical Dimension Metrology in a SEM

J R. Lowney, 1996 .

MONSEL-II Monte Carlo Simulation of SEM Signals for Linewidth Metrology

J R. Lowney, 1995 .